(Technology Transfer) Rhombohedron epitaxial growth with Molten Target Sputtering (MTS) at 500oC substrate temperature

Year of publication

2025

Inventor

Hyun Jung Kim and Sang H. Choi

Application No.

Application date

Registration No.

US 11,885,040 B2

Registration date

January 30, 2024

Publication No.

NASA Case No. LAR 18730-2, e-NTR #: 1425308596

Published date

July 31, 2015

Firm No.

License #DN-2385

Firm date

April 15, 2025

Agency

Licensed to Global Photonics Solutions LLC