High mobility transport layer structures for rhombohedral Si/Ge/SiGe devices

Year of publication

2019

Inventor

Hyun Jung Kim, Yeonjoon Park, Sang H. Choi, Glen C. King, Kunik Lee

Application No.

9/614,026

Application date

Registration No.

10,256,305 B2

Registration date

Firm date

April 2019

Agency

US Patent