Growth Method of Highly Twinned SiGe alloy on the Basal Plane of Trigonal Substrate Under Electron Beam Irradiation

Year of publication

2017

Inventor

Hyung Jung Kim, Yeonjoon Park, and Sang H. Choi

Application No.

Application date

Registration No.

9,835,570

Registration date

Firm date

December 5, 2017

Agency

US Patent