High quality SiGe film prepared by two-step thermal evaporation and sputtering process

Year of publication

2014

Inventor

Hyun Jung Kim and Glen C. King

Application No.

Application date

Registration No.

Registration date

Publication No.

NASA Invention Disclosure Case No. 18124-1, 2012

Firm date

(Prepare non-provisional application, 04/08/2014)