Rhombohedron Epitaxial Growth with Molten Target Sputtering (MTS) at 500oC Substrate Temperature

Year of publication

2020

Inventor

Hyun Jung Kim and Sang H. Choi

Application No.

Application date

Registration No.

10,858,754

Registration date

December 8, 2020

Publication No.

NASA Invention Disclosure Case No. LAR-18730-1

Agency

US Patent